Nano and Micromachining, , Wiley, John Wiley & Sons,Electronic devices and materials,Electronics engineering, elements; molecular; basic; dynamics; description; conditions; md; requirements; simulations; stateoftheart; material removal; capabilities; nanoscale; microstructure; forces; removal; simulation; material; process; fluids; consideration,, , United States, en-UShttps://www.wiley.comelements; molecular; basic; dynamics; description; conditions; md; requirements; simulations; stateoftheart; material removal; capabilities; nanoscale; microstructure; forces; removal; simulation; material; process; fluids; consideration, [BLURB],[CITY],,books, ebooks, biblet, Book2look